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The CRS silane combustion scrubber is designed to treat hazardous gases such as silane (SiH4), ammonia (NH3), and other soluble exhaust gases generated in photovoltaic and CVD production processes.
By combining combustion and wet scrubbing technology, the system achieves up to 99.99% purification efficiency, ensuring safe and stable exhaust gas treatment.
A. Suitable for solar cell manufacturing and semiconductor industries
B. Custom design available for different airflow capacities
C. Reliable operation with low maintenance cost
Contact us today for technical details or a quotation.
This system is widely used in industries where silane and related gases are generated, including:
A. Photovoltaic solar cell production lines
B. Semiconductor manufacturing
C. CVD (Chemical Vapor Deposition) processes
D. Electronics and advanced materials industries
● Stainless steel silane combustion purification tower must ensure negative pressure of about 200Pa.
● An emergency combustion cylinder must be installed behind the vacuum pump of PECVD equipment (see the equipment flow chart).
● Stainless steel silane combustion purification tower must adopt a new process, double fan air extraction, one use one standby.
● The electric regulating valve of the fan inlet must be linked with the fan.
● A disc valve must be installed before the air inlet of the fan to control the negative pressure in the silane combustion purification device.
● Silane combustion purification device fresh air supply outlet must be equipped with a regulating valve.
● 1 ~ 1.5 meters outside the inlet pipe interface must be connected by a dismountable port to prevent the removal of debris from the combustion box.
This product is made of high quality stainless steel raw materials, according to the characteristics of silane contact with air and spontaneous combustion, so that silane in the combustion chamber and air contact combustion, the gas after combustion through the packing layer and then into the combustion tower spray chamber, after spray treatment, so that the exhaust gas and the neutral circulation liquid contact reaction, and then into the dehydrator dehydrating treatment by the exhaust fan discharged into the atmosphere.
We provide customized solutions based on different project requirements:
A. Airflow capacity design (200–15000 m³/h)
B. Different gas compositions and concentrations
C. Layout and installation requirements
D. Integration with existing exhaust systems
Our engineering team can provide technical consultation and tailored system design for your project.
A. Full cycle professional services from design to commissioning
B. 40+ patented technologies & strong R&D team
C. ISO certified quality and international compliance
D. High efficiency with cost effective solutions
E. Fast after sales support and maintenance
F. Proven solutions across multiple industrial sectors
| Stainless steel silane combustion tower | Type number | CRS－1 | CRS－2 | CRS－3 | CRS－4 | CRS－5 | CRS－6 | CRS－7 | CRS－8 | CRS－9 | CRS－10 | CRS-Ⅱ-2 | CRS-Ⅱ-4 | CRS-Ⅲ-4 | CRS-Ⅳ-4 |
|
Treated air volume m3/h |
～200 | ～400 | ～600 | ～800 | ～1000 | ～1200 | ～1400 | ～1600 | ～1800 | ～2000 | ～3500 | ～7000 | ～10000 | ～15000 | |
|
Equipment resistance Pa |
400 | ||||||||||||||
|
Silane removal rate % |
≥99.99 | ||||||||||||||
|
Ammonia removal rate % |
≥99.99 | ||||||||||||||
|
Compressed air volume L/min |
400 | 600 | 1000 | 1500 | 2000 | ||||||||||
|
Nitrogen content L/min |
200 | 300 | 500 | 800 | 1000 | ||||||||||
| Select the air distributor | Type number | 3A | 3A | 3A | 3A | 3.5A/5.5A | 3.5A/5.5A | 3.5A/5.5A | 3.5A/5.5A | 3.5A/5.5A | 3.5A/5.5A | 4A | 4A | 6A | 6C |
|
Motor power kw |
1.5 | 1.5 | 1.5 | 1.5 | 3/2.2 | 3/2.2 | 3/2.2 | 3/2.2 | 3/2.2 | 3/2.2 | 5.5 | 5.5 | 4 | 7.5 | |
|
Motor speed r/min |
2900 | 2900 / 1450 | 2900 | 2900 | 2900 | 1800 | |||||||||
| Circulator pump | Type number | KP40-1 | KP40-2 | KD40-3 | KD50-3 | KD50-3 | KD50-3 | KD50-3 | KD50-3 | KD50-3 | KD50-3 |
KD50-3 KP40-1 |
KD50-3 KP40-1 |
KD50-5 KP40-1 |
KD65-5 KP40-1 |
|
Motor power kw |
0.75 | 1 | 2.2 | 2.2 | 2.2 | 2.2 | 2.2 | 2.2 | 2.2 | 2.2 | 2.2/0.75 | 2.2/0.75 | 3.75/0.75 | 3.75/0.75 | |
|
Motor speed r/min |
2900 | ||||||||||||||
| Power source |
Electric voltage V |
AC380 | |||||||||||||
|
frequency Hz |
50 | ||||||||||||||
| Appearance and mounting dimensions | Tower diameter | 1200 | 1200 | 1200 | 1200 | 1400 | 1400 | 1400 | 1400 | 1400 | 1400 | 1400×1900 | 1400×2400 | 1400×2400 | 1400×2800 |
|
Exhaust diameter D1 |
350 | 350 | 350 | 350 | 350 | 350 | 350 | 350 | 350 | 350 | 350 | 350×2 | 350×2 | 400×2 | |
|
Inlet diameter D2×n(a) |
65×1 | 65×2 | 65×3 | 65×4 | 65×5 | 65×6 | 65×7 | 65×8 | 65×9 | 65×10 | 150×2 | 150×4 | 200×4 | 250×4 | |
|
Outlet pipe D3 |
400 | 400 | 400 | 400 | 400 | 400 | 400 | 400 | 400 | 400 | 400 | 500 | 500 | 600 | |
| Fresh air intake | 100×100 | 200×200 | |||||||||||||
|
derrick A×A |
2100×2100 | 2400×2400 | |||||||||||||
|
Tower height H |
2800 | ||||||||||||||
| h1 | 500 | ||||||||||||||
| h1 | 750 | ||||||||||||||
| h3 | ≥400 | ||||||||||||||
| L1 | 2800 | 2800 | 2800 | 2800 | 3000 | 3000 | 3000 | 3000 | 3000 | 3000 | 3500 | 3500 | 3500 | 3500 | |
| L2 | 6000 | 6000 | 6000 | 6000 | 7000 | 7000 | 7000 | 7000 | 7000 | 7000 | 7000 | 7000 | 7000 | 7000 | |
| L3 | 2800 | 2800 | 2800 | 2800 | 3000 | 3000 | 3000 | 3000 | 3000 | 3000 | 3500 | 3500 | 3500 | 3500 | |
| L4 | 7000 | 7000 | 7000 | 7000 | 8000 | 8000 | 8000 | 8000 | 8000 | 8000 | 9000 | 9000 | 9000 | 9000 | |
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