The methods for converting silane into harmless substances mainly include the following specific waste gas treatment technologies:

Catalytic oxidation:
Silane is reacted with oxygen at a low temperature through a catalyst (such as platinum, palladium, etc.) to produce silicon dioxide (SiO?) and water (H?O). This method is highly efficient and has relatively low energy consumption.

Thermal decomposition:
Silane is heated and decomposed at high temperatures (usually above 600°C) to produce silicon dioxide and hydrogen. This method is suitable for the treatment of large amounts of silane, but the energy consumption is high.

Plasma treatment:
Silane is decomposed at low temperatures using plasma technology. This method can effectively remove organic matter from the gas and convert it into harmless gas components.

Chemical absorption:
A chemical absorbent (such as a strong acid or a strong base) is used to react with silane to form a harmless compound. This method is suitable for treating silane gas with high concentrations.

Biological treatment:
In some cases, specific microorganisms or enzymes can be used to degrade silane, but this method is still in the research stage and is rarely used.

Condensation separation:
Silane gas is condensed into liquid by lowering the temperature, and then separated and processed. Although this method can reduce gas emissions, it requires additional cooling equipment.

Each of these methods has advantages and disadvantages. The selection of a specific treatment technology should be based on comprehensive considerations of factors such as silane concentration, treatment scale, economics, and environmental regulations.