Silane purification tower is a kind of equipment used to separate and purify silane gas, which is widely used in fields such as semiconductor manufacturing and solar cells. Its main function is to remove impurities in silane to ensure the gas quality in the production process.

Working principle of silane purification tower
Feeding: Unpurified silane gas enters the purification tower through the feed port.
Adsorption or reaction: In the tower, silane gas contacts with the filling material (such as activated carbon, molecular sieve, etc.), and impurities are adsorbed or chemically reacted.
Purification: The purified silane gas is discharged from the top of the tower to achieve the required purity.
Regeneration: The filling material is regenerated regularly to restore its adsorption capacity.
Application field
Semiconductor manufacturing
Solar cell production
Other industries that require high-purity silane
Precautions
Silane is a flammable and toxic gas, and safety regulations must be followed when operating.
Regularly check the tightness of the equipment and the effectiveness of the filling material.
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