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Semiconductor Exhaust Treatment for Electronics Manufacturing

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Semiconductor Exhaust Treatment for Electronics Manufacturing
Glance over:- Release date:May 28, 2024【Big In Small

Semiconductor Exhaust Treatment for Electronics Manufacturing For Lite-On Technology (Changzhou) Co., Ltd.


Challenge
Lite-On Technology, a global leader in optoelectronic components, required a comprehensive exhaust treatment solution for their Changzhou semiconductor facility. Key requirements included:
• Handling mixed exhaust streams containing acid mist and VOCs from semiconductor processes
• Ensuring stable operation with minimal interference to 24/7 production schedules
• Meeting strict national emission standards for both acid gases and organic compounds
• Providing long-term reliability with accessible maintenance design


Our Solution
Chaori Environmental designed an integrated exhaust treatment system combining wet scrubbing and activated carbon fiber purification technologies.
Key features include:
• Customized FRP wet scrubber for efficient acid mist removal with corrosion-resistant construction
• Activated carbon fiber organic exhaust purifier for high-efficiency VOCs adsorption and recovery
• Compact modular design suitable for space-constrained semiconductor cleanroom environments
• Automated control system with real-time monitoring for consistent compliance


Results
The system was engineered to deliver:
• Stable removal performance for both acid mist and organic exhaust components
• Low-maintenance operation supporting continuous semiconductor production
• Reliable long-term performance in high-purity manufacturing environment
• Full compliance with GB16297-1996 and relevant semiconductor industry standards


Facing Similar Exhaust Challenges?
Chaori Environmental provides customized wet scrubbing and organic exhaust solutions for semiconductor, photovoltaic, and electronics industries.

China Energy Conservation Solar Energy Technology (Zhenjiang) Co., Ltd

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